More Efficient Optical Sectioning Structured Illumination Microscopy

In this paper, a structural illumination based technology for microscopic surface topography measurement is investigated, in which only one shot structural illumination image is grabbed and a more efficient optical sectioned image reconstruction algorithm based on Hilbert transform was proposed. Compared with other methods, the technology can avoid strip artefacts problems of in-focus images resulting from the sinusoidal phases mismatch in spatial domain in conventional three-step phase-shifting since the phase-shifting steps decreases from three to one, and the measurement time is decreased effectively. The experimental testing is carried out to verify the feasibility and its measurement accuracy.