共 31 条
Organic ultrathin film adhesion on compliant substrate using scratch test technique
被引:13
作者:
Boddaert, X.
[1
]
Covarel, G.
[2
]
Bensaid, B.
[1
]
Mattei, M.
[1
]
Benaben, P.
[1
]
Bois, J.
[1
]
机构:
[1] Ecole Natl Super Mines, Ctr Microelect Provence Georges Charpak, F-13120 Gardanne, France
[2] Univ Haute Alsace, Lab Phys & Mecan Text, F-68093 Mulhouse, France
来源:
关键词:
Nanoscratch;
Adhesion;
Flexible substrate;
Organic electronics;
Thin layer;
Delamination;
ENERGY-RELEASE RATES;
MECHANICAL-PROPERTIES;
COATINGS;
FRACTURE;
POLYMERS;
BLISTER;
TRANSISTORS;
HARDNESS;
D O I:
10.1016/j.tsf.2012.07.138
中图分类号:
T [工业技术];
学科分类号:
08 ;
摘要:
Many adhesion test techniques have been developed to measure the adhesion energy of thin films but they are hard to implement in the case of submicron organic thin films deposited on a flexible substrate. Recently the feasibility and repeatability of the scratch test technique as a tool for testing the adhesion and the damage behaviour of ultra-thin films on polymer substrates has been demonstrated. However, direct comparison of the critical load between samples was not straightforward since different failure mechanisms were induced. In the present work, we have performed nanoscratch experiments on submicron thin films deposited on a flexible substrate. The use of a tip radius of 5 mu m enabled a unique delamination mechanism to be induced by localizing and maximizing the stress closer to the interface. We have observed an increase of the critical load on samples processed with an adhesive plasma treatment prior to thin film deposition, confirming the effectiveness of this treatment. We have also performed mechanical ageing tests on specimens and proved that the scratch test technique is sensitive enough to monitor the degradation of the interface properties. Finally, we have discussed some existing energy models. Taking into account some limitations, Laugier's model gives an upper bound for the adhesion energy. (c) 2012 Elsevier B.V. All rights reserved.
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页码:194 / 198
页数:5
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