Effects of acetylacetone on the preparation of sol-gel derived (Ca0.8Sr0.2)TiO3 dielectric thin films

被引：1

作者：

Tseng, Ching-Fang ^{[1
]}

Lu, Yun-Pin ^{[1
]}

机构：

[1] Natl United Univ, Dept Elect Engn, Kung Ching Li 36003, Miao Li, Taiwan

来源：

SURFACE & COATINGS TECHNOLOGY | 2013年 / 231卷

关键词：

Acetylacetone; Sol-gel method; (Ca0.8Sr0.2)TiO3 thin film; ELECTRICAL-PROPERTIES; MICROSTRUCTURE;

D O I：

10.1016/j.surfcoat.2012.02.022

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Electrical properties and microstructures of (Ca0.8Sr0.2)TiO3 thin films prepared by sol-gel method using acetylacetone modifier on n-type Si(100) substrates at different molar ratio of acetylacetone to titanium alkoxide and annealing temperatures have been investigated. The diffraction pattern showed that the deposited films exhibited a polycrystalline microstructure. All films exhibited (Ca0.8Sr0.2)TiO3 peak orientation perpendicular to the substrate surface and the grain size with the increase in the molar ratio of acetylacetone to titanium alkoxide and annealing temperature. The dependence of the physical and electrical characteristics on various molar ratio of acetylacetone to titanium alkoxide and annealing temperatures were also investigated. (C), 2012 Elsevier B.V. All rights reserved.

引用

页码：10 / 13

页数：4

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