A Load-Pull Wafer-Mapper

被引：0

作者：

Vanaverbeke, F. ^{[1
]}

Vaesen, K. ^{[1
]}

Xiao, D. ^{[1
]}

Pauwels, L. ^{[1
]}

De Raedt, W. ^{[1
]}

Germain, A. ^{[1
]}

Degroote, S. ^{[1
]}

Das, J. ^{[1
]}

Derluyn, J. ^{[1
]}

Schreurs, D. ^{[1
]}

机构：

[1] IMEC Vzw, B-3001 Heverlee, Belgium

来源：

2008 IEEE MTT-S International Microwave Symposium Digest, Vols 1-4 | 2008年

关键词：

Automated; Waferstepper; Load Pull; GaN; wafermaps;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper describes an automated load-pull measurement testbench for the characterization of GaN power HEMTs. The setup was built around a vector network analyzer (VNA) and an electromechanical tuner. The setup is combined with a semi-automatic wafer-stepper, allowing for complete large-signal wafer-mapping. Both calibration and measurement procedure are explained in mathematical detail.

引用

页码：1702 / 1708

页数：7