Epitaxial growth theory: Vapor-phase and surface chemistry

被引：13
作者：
Cavallotti, C [1 ]
Masi, M [1 ]
机构：
[1] Politecn Milan, Dipartimento Chim Fis Applicata, I-20133 Milan, Italy
来源：
SILICON EPITAXY | 2001年 / 72卷 / 0C期
关键词：
D O I：
10.1016/S0080-8784(01)80180-0
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
[No abstract available]
引用
收藏
页码：51 / 88
页数：38
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