Discharge impedance of solenoidal inductively coupled plasma discharge

被引：29

作者：

You, KI ^{[1
]}

Yoon, NS ^{[1
]}

机构：

[1] Korea Basic Sci Inst, Taejon 305333, South Korea

来源：

PHYSICAL REVIEW E | 1999年 / 59卷 / 06期

关键词：

D O I：

10.1103/PhysRevE.59.7074

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

The discharge impedance is calculated for a solenoidal inductively coupled plasma (ICP) discharge, which is one of the important sources for plasma processing. To calculate this impedance, the electromagnetic field quantities are obtained by solving the two-dimensional Maxwell equations in a realistic geometry, Also considered in the calculation is the anomalous skin effect which is regarded as a collisionless heating mechanism of ICP discharge. The results show that the discharge impedance is a function of various discharge parameters, such as plasma density, electron temperature, antenna position, collision frequency, excitation frequency, and chamber geometry.

引用

页码：7074 / 7084

页数：11

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