Coolant effects on tool wear in machining single-crystal silicon with diamond tools

被引：12

作者：

Ohta, Tsutomu ^{[1
]}

Yan, Jiwang ^{[2
]}

Kodera, Sunao ^{[1
]}

Yajima, Shuuma ^{[1
]}

Horikawa, Naoyuki ^{[3
]}

Takahashi, Youichi ^{[3
]}

Kuriyagawa, Tsunemoto ^{[2
]}

机构：

[1] Mitsubishi Electr Corp, Kamakura Works, 325 Kamimachiya, Kanagawa 2478520, Japan

[2] Tohoku Univ, Dept Nanomech, Sendai, Miyagi 9808579, Japan

[3] Tokyo Diamond Tools Mfg Co Ltd, Nagano 3940001, Japan

来源：

ADVANCES IN ABRASIVE TECHNOLOGY XI | 2009年 / 389-390卷

关键词：

single-crystal silicon; infrared lens; ductile cutting; diamond turning; tool wear; coolant;

D O I：

10.4028/www.scientific.net/KEM.389-390.144

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

The service life of a diamond tool in cutting single-crystal silicon is normally very short because of severe tool wear. Therefore, it is important to use a proper coolant in order to restrain tool wear. In this paper, the performances of oil-based and water-based coolants were compared in silicon machining by investigating cutting forces and tool wear geometries. The water-based coolant was found to restrain flank wear more effectively than the oil-based one. The effective tool life using the water-based one was averagely three times longer than that using the oil-based one. The tool wear mechanism might be related to microplasma generated between silicon and diamond during cutting.

引用

页码：144 / +

页数：2

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