Study on key algorithm for scanning white-light interferometry

被引：3

作者：

Tian Ailing ^{[1
]}

Wang Chunhui ^{[1
]}

Jiang Zhuangde ^{[2
]}

Wang Hongjun ^{[1
]}

Liu Bingcai ^{[1
]}

机构：

[1] Xian Technol Univ, Sch Photoelect Engn, Xian 710032, Peoples R China

[2] Xi An Jiao Tong Univ, Inst Precis Engn, Xian 710049, Peoples R China

来源：

NINTH INTERNATIONAL SYMPOSIUM ON LASER METROLOGY, PTS 1 AND 2 | 2008年 / 7155卷

关键词：

white-light interferometry; profile measurement; zero order fringes; numerical simulation;

D O I：

10.1117/12.814597

中图分类号：

V [航空、航天];

学科分类号：

08 ; 0825 ;

摘要：

Determining the location of the zero order fringes is one of the key aspects in scanning white-light interferometry. The measurement principle of the scanning white-light interferometry is introduced at first; then the location of the zero order fringes as calculated by four different algorithms; namely Weight-center, Phase-shift, Frequency Domain Analysis (FDA), and Coherent Correlation are compared. Finally, numerical simulations on random generated surfaces are done to reach conclusions by comparing and analyzing the results. The research is important in the understanding and development of white-light interferometry.

引用

页数：8

共 11 条

[1]

CHEN S, 1992, APPT OPT, V1, P6003

[2] Signal modeling for low-coherence height-scanning interference microscopy [J].