Lithium niobate on insulator (LNOI) for micro-photonic devices

被引：582

作者：

Poberaj, Gorazd ^{[2
]}

Hu, Hui ^{[1
]}

Sohler, Wolfgang ^{[1
]}

Guenter, Peter ^{[2
]}

机构：

[1] Univ Gesamthsch Paderborn, D-33098 Paderborn, Germany

[2] ETH, Inst Quantum Elect, Nonlinear Opt Lab, CH-8093 Zurich, Switzerland

来源：

LASER & PHOTONICS REVIEWS | 2012年 / 6卷 / 04期

基金：

瑞士国家科学基金会;

关键词：

Lithium niobate; lithium niobate on insulator; crystal ion slicing; wafer bonding; thin films; waveguides; integrated optics; photonic devices; OPTICAL WAVE-GUIDE; LINBO3; THIN-FILMS; FABRICATION; PHYSICS; GROWTH; INDEX; OXIDE;

D O I：

10.1002/lpor.201100035

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The state-of-the-art of high-refractive-index-contrast single-crystalline thin lithium niobate (LiNbO3) films as a new platform for high-density integrated optics is reviewed. Sub-micrometer thin LiNbO3 films are obtained by "ion-slicing". They can be bonded by two different techniques to a low-index substrate to obtain "lithium niobate on insulator" (LNOI) even as wafer of 3 diameter. Different micro-and nano-structuring techniques have been used to successfully develop micro-photonic devices. To be specific, the fabrication and characterization of LNOI photonic wires with cross-section < 1 mu m(2), periodically poled LNOI photonic wires for second harmonic generation, electro-optically tunable microring resonators, free standing microrings for hybrid integration, and photonic crystal structures are described.

引用

页码：488 / 503

页数：16

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