共 13 条
- [2] Nanoimprint lithography [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (06): : 4129 - 4133
- [3] Nanoimprint lithography: Methods and material requirements [J]. ADVANCED MATERIALS, 2007, 19 (04) : 495 - 513
- [6] Fabrication of plastic microlens arrays using hybrid extrusion rolling embossing with a metallic cylinder mold fabricated using dry film resist [J]. OPTICS EXPRESS, 2007, 15 (19): : 12088 - 12094
- [7] Rapid hot embossing of polymer microfeatures [J]. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2006, 12 (08): : 730 - 735