400-A (Pulsed) Vertical GaN p-n Diode With Breakdown Voltage of 700 V

被引:45
作者
Kizilyalli, Isik C. [1 ]
Edwards, Andrew P. [1 ]
Nie, Hui [1 ]
Bui-Quang, Phong [1 ]
Disney, Donald [2 ]
Bour, Dave [1 ]
机构
[1] Avogy Inc, San Jose, CA 95134 USA
[2] GlobalFoundries, Santa Clara, CA 95054 USA
关键词
Gallium nitride; power-semiconductor devices; bulk GaN substrates; power diodes; scaling; ALGAN/GAN HEMTS;
D O I
10.1109/LED.2014.2319214
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
There is a great interest in monolithic GaN semiconductor devices with high current capability for power electronics. In this letter, large area vertical GaN p-n diodes fabricated on bulk GaN substrates are discussed. Diodes with areas as large as 16 mm(2) with breakdown voltages exceeding 700 V and pulsed (100 mu s) currents approaching 400 A are reported. This is made possible for the first time in part due to the recent availability of improved quality bulk GaN substrates.
引用
收藏
页码:654 / 656
页数:3
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