DYNAMIC SWITCHING OF MEMS SHUNT SWITCHES

被引：0
作者：
Khater, Mahmoud E. [1 ]
Vummidi, Krishna
Abdel-Rahman, Eihab M. [1 ]
Nayfeh, Ali H.
Raman, Sanjay
机构：
[1] Univ Waterloo, Waterloo, ON N2L 3G1, Canada
来源：
PROCEEDINGS OF THE ASME INTERNATIONAL DESIGN ENGINEERING TECHNICAL CONFERENCES AND COMPUTERS AND INFORMATION IN ENGINEERING CONFERENCE, DETC 2010, VOL 4 | 2010年
关键词：
RF switch; Dynamics switching; Voltage requirements; PULL-IN; VOLTAGE;
D O I：
暂无
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
We investigate dynamic switching modes of capacitive MEMS shunt switches using a biased AC signal. We show that the voltage requirements for dynamic switching are significantly less than those for static switching. We found out that significant reductions in actuation voltage can be obtained. However, the switching time is longer than that realized using static switching. We also examine various actuation schemes to further reduce the actuation voltage. As a result, we obtain 60% reduction in the actuation voltage.
引用
收藏
页码：561 / 569
页数：9
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