Template assisted synthesis of porous metal oxide and metal nanostructures by ALD

被引：1

作者：

Deng, S. ^{[1
]}

Kurttepeli, M. ^{[2
]}

Bals, S. ^{[2
]}

Cott, D. J. ^{[3
]}

Detavernier, C. ^{[1
]}

机构：

[1] Univ Ghent, Dept Solid State Sci, B-9000 Ghent, Belgium

[2] Univ Antwerp, EMAT, B-2000 Antwerp, Belgium

[3] IMEC, Kapeldreef 75, B-3001 Leuven, Belgium

来源：

ATOMIC LAYER DEPOSITION APPLICATIONS 12 | 2016年 / 75卷 / 06期

基金：

欧洲研究理事会;

关键词：

ATOMIC-LAYER DEPOSITION; TIO2 NANOTUBE ARRAYS; SENSITIZED SOLAR-CELLS; UNIFORM WALL THICKNESS; NITRIDE INVERSE OPALS; CARBON NANOTUBES; THIN-FILMS; ULTRAPRECISE CONTROL; GRAPHENE NANOSHEETS; DIRECTED SYNTHESIS;

D O I：

10.1149/07506.0047ecst

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

Porous materials are widely used in various applications since they can provide tremendous active surface area, e.g. in catalysis, energy storage, absorption and detection of toxic materials, etc. In recent years, due to its superior advantage in conformally coating porous materials, the ALD technique attracted great attention and has been used to synthesize nanomaterials with porous features. Templates are indispensable for these ALD-based approaches, since ALD can only deposit 2D thin film instead of 3D porous structures. In this paper, we will give a thorough review on the existing literature reported on template assisted and ALD based syntheses of porous nanomaterials of metal oxides and metals. The dis/advantages of each kind of template will be surveyed.

引用

页码：47 / 68

页数：22

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