Development of a ta-C diamond-like carbon (DLC) coating by magnetron sputtering for use in precision glass molding

被引：26

作者：

Bernhardt, F. ^{[1
]}

Georgiadis, K. ^{[1
]}

Dolle, L. ^{[1
]}

Dambon, O. ^{[1
]}

Klocke, F. ^{[1
]}

机构：

[1] Fraunhofer Inst Prod Technol, D-52074 Aachen, Germany

来源：

MATERIALWISSENSCHAFT UND WERKSTOFFTECHNIK | 2013年 / 44卷 / 08期

关键词：

Precision glass molding; MSIP sputtering; Ion plating; diamond-like carbon; DLC; ta-C; thermo-chemical resistance;

D O I：

10.1002/mawe.201300171

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Diamond-like carbon (DLC) coatings have become the most versatile class of coatings in various applications. However, most methods are not practical for industrial fabrication chains. The work presented here the deposition of ta-C (tetrahedral amorphous carbon = ta-C) coatings on molding tools for use in precision glass molding by Magnetron Sputtering Ion Plating (MSIP). The coating properties are analyzed by Scanning Electron Microscopy (SEM), Raman spectroscopy and molding tests. By using ion plating, carbon bonds can be induced to change towards the sp(3) form by increasing the internal coating stress. Using this technique, it was possible to increase the sp(3) ratio to about 60%, whereas 40% or less is often reported for conventional sputtering.

引用

页码：661 / 666

页数：6