Non-iterative method for phase retrieval and coherence characterization by focus variation using a fixed star-shaped mask

被引:9
作者
Konijnenberg, A. P. [1 ]
Lu, Xingyuan [2 ,3 ]
Liu, Leixin [2 ,3 ]
Coene, W. M. J. [1 ,4 ]
Zhao, Chengliang [2 ,3 ]
Urbach, H. P. [1 ]
机构
[1] Delft Univ Technol, Opt Res Grp, NL-2628 AL Delft, Netherlands
[2] Soochow Univ, Coll Phys Optoelect & Energy, Suzhou 215006, Peoples R China
[3] Soochow Univ, Collaborat Innovat Ctr Suzhou Nano Sci & Technol, Suzhou 215006, Peoples R China
[4] ASML Netherlands BV, De Run 6501, NL-5504 DR Veldhoven, Netherlands
来源
OPTICS EXPRESS | 2018年 / 26卷 / 07期
基金
中国国家自然科学基金;
关键词
RECONSTRUCTION;
D O I
10.1364/OE.26.009332
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A novel non-iterative phase retrieval method is proposed and demonstrated with a proof-of-principle experiment. The method uses a fixed specially designed mask and throughfocus intensity measurements. It is demonstrated that this method is robust to spatial partial coherence in the illumination, making it suitable for coherent diffractive imaging using spatially partially coherent light, as well as for coherence characterization. (c) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
引用
收藏
页码:9332 / 9343
页数:12
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