The Investigation of E-beam Deposited Titanium Dioxide and Calcium Titanate Thin Films

被引：2
|
作者：
Bockute, Kristina [1 ]
Laukaitis, Giedrius [1 ]
Virbukas, Darius [1 ]
Milcius, Darius [2 ]
机构：
[1] Kaunas Univ Technol, Dept Phys, LT-51368 Kaunas, Lithuania
[2] Lithuanian Energy Inst, Ctr Hydrogen Energy Technol, LT-44403 Kaunas, Lithuania
来源：
MATERIALS SCIENCE-MEDZIAGOTYRA | 2013年 / 19卷 / 03期
关键词：
electron beam evaporation; titanium oxide; calcium titanate; optical properties; OPTICAL-PROPERTIES; SURFACE-ROUGHNESS; OXIDE FILMS; COATINGS; SOLAR;
D O I：
10.5755/j01.ms.19.3.1805
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Thin titanium dioxide and calcium titanate films were deposited using electron beam evaporation technique. The substrate temperature during the deposition was changed from room temperature to 600 degrees C to test its influence on TiO2 film formation and optical properties. The properties of CaTiO3 were investigated also. For the evaluation of the structural properties the formed thin ceramic films were studied by X-ray diffraction (XRD), energy dispersive spectrometry (EDS), scanning electron microscopy (SEM) and atomic force microscopy (AFM). Optical properties of thin TiO2 ceramics were investigated using optical spectroscope and the experimental data were collected in the ultraviolet-visible and near-infrared ranges with a step width of 1 nm. Electrical properties were investigated by impedance spectroscopy.It was found that substrate temperature has influence on the formed thin films density. The density increased when the substrate temperature increased. Substrate temperature had influence on the crystallographic, structural and optical properties also.
引用
收藏
页码：245 / 249
页数：5
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