Low-Temperature Chemical Vapor Deposition Growth of Graphene Layers on Copper Substrate Using Camphor Precursor

被引:4
|
作者
Kavitha, K. [1 ]
Urade, Akanksha R. [1 ]
Kaur, Gurjinder [2 ]
Lahiri, Indranil [1 ,2 ]
机构
[1] Indian Inst Technol Roorkee, Ctr Excellence Nanotechnol, Roorkee 247667, Uttar Pradesh, India
[2] Indian Inst Technol Roorkee, Dept Met & Mat Engn, Nanomat & Applicat Lab, Roorkee 247667, Uttar Pradesh, India
关键词
Graphene; Camphor; Copper; Chemical Vapor Deposition; HIGH-QUALITY; LARGE-AREA; FILMS; ELECTRODE; SHEETS; CVD;
D O I
10.1166/jnn.2020.18862
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
A two-step, low-temperature thermal chemical vapor deposition (CVD) process, which uses camphor for synthesizing continuous graphene layer on Cu substrate is reported. The growth process was performed at lower temperature (800 degrees C) using camphor as the source of carbon. A three-zone CVD system was used for controlled heating of precursor, in order to obtain uniform graphene layer. As-grown samples were characterized by X-ray diffraction (XRD), Raman spectroscopy and transmission electron microscopy (TEM). The results show the presence of 4-5 layers of graphene. As-grown graphene transferred onto a glass substrate through a polymer-free wet-etching process, demonstrated transmittance similar to 91% in visible spectra. This process of synthesizing large area, 4-5 layer graphene at reduced temperature represents an energy-efficient method of producing graphene for possible applications in opto-electronic industry.
引用
收藏
页码:7698 / 7704
页数:7
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