Sub-ppm trace moisture detection with a simple thermally carbonized porous silicon sensor

被引：24
作者：
Salonen, J [1 ]
Tuura, J [1 ]
Björkqvist, M [1 ]
Lehto, VP [1 ]
机构：
[1] Turku Univ, Dept Phys, FIN-20014 Turku, Finland
来源：
SENSORS AND ACTUATORS B-CHEMICAL | 2006年 / 114卷 / 01期
基金：
芬兰科学院;
关键词：
porous silicon; thermal carbonization; humidity sensor; trace moisture;
D O I：
10.1016/j.snb.2005.04.050
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
A simple humidity sensor based on thermally carbonized porous silicon has been used to detect low moisture contents in gaseous atmosphere. Thermal carbonization of porous silicon changes the surface to hydrophilic and improves the sensitivity and the stability of the sensor. The capacitive sensitivity (C/C-0 - 1) over 6% in a range of 0-1 RH% was obtained. The resolutions for capacitive and resistive measurements were found to be 0.45 and 0.3.5 ppm, respectively. The resolution was limited by noise level and with a simple data averaging it was improved down to 0.20 ppm. The response time was observed to be good and it varied from 0.5 to 2.6 min. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码：423 / 426
页数：4
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