A liquid-phase sensor using shear horizontal surface acoustic wave devices

被引：23

作者：

Kondoh, Jun ^{[1
,2
]}

机构：

[1] Shizuoka Univ, Fac Engn, Shizuoka 4228529, Japan

[2] Shizuoka Univ, Grad Sch Sci & Engn, Shizuoka 4228529, Japan

来源：

ELECTRONICS AND COMMUNICATIONS IN JAPAN | 2013年 / 96卷 / 02期

关键词：

shear horizontal surface acoustic wave (SH-SAW); liquid-phase sensor; mechanical perturbation; electrical perturbation; comparison of sensor sensitivity; PROPAGATION; CRYSTAL; SYSTEM; CELL;

D O I：

10.1002/ecj.10407

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A surface acoustic wave (SAW) is perturbed due to physical and/or chemical changes in an adjacent medium. If a liquid-phase sensor is to be realized, a shear horizontal SAW (SH-SAW) must be used. SH-SAW sensors have been investigated since 1987. Objects measured using an SH-SAW sensor include not only immunoreactions but also liquid properties. The advantage of an SH-SAW sensor is the simultaneous detection of the mechanical and electrical properties of liquids. In this paper, first, the theory behind the SH-SAW sensor is described. Then experimental results using the SH-SAW sensor on 36YX-LiTaO3 are introduced. In addition, the sensor sensitivities of the SH-SAW sensors that have been fabricated on piezoelectric substrates are theoretically compared. (c) 2013 Wiley Periodicals, Inc. Electron Comm Jpn, 96(2): 4149, 2013; Published online in Wiley Online Library (wileyonlinelibrary.com). DOI 10.1002/ecj.10407

引用

页码：41 / 49

页数：9

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