Thermoelastic damping of the axisymmetric vibration of circular plate resonators

被引：113

作者：

Sun, Yuxin ^{[1
]}

Tohmyoh, Hironori ^{[1
]}

机构：

[1] Tohoku Univ, Dept Nanomech, Aoba Ku, Sendai, Miyagi 9808579, Japan

来源：

JOURNAL OF SOUND AND VIBRATION | 2009年 / 319卷 / 1-2期

关键词：

SINGLE-CRYSTAL SILICON; INTERNAL-FRICTION; BEAM RESONATORS; MICRORESONATORS; DISSIPATION; CURRENTS;

D O I：

10.1016/j.jsv.2008.06.017

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

Thermoelastic damping is recognized as a significant loss mechanism at room temperature in micro-scale circular plate resonators. In this paper, the governing equations of coupled thermoelastic problems are established for axisymmetrie out-of-plane vibration of circular plate. Then the analytical expression for thermoelastic damping is obtained. The effects of environmental temperature, plate dimensions and boundary conditions on the thermoelastic damping are studied. (c) 2008 Elsevier Ltd. All rights reserved.

引用

页码：392 / 405

页数：14

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