Enhancing thermally induced effects on atomic force microscope cantilevers using optical microcavities

被引：10

作者：

Vy, Nguyen Duy ^{[1
,2
]}

Iida, Takuya ^{[3
]}

机构：

[1] Ton Duc Thang Univ, Theoret Phys Res Grp, Ho Chi Minh City 756636, Vietnam

[2] Ton Duc Thang Univ, Fac Sci Appl, Ho Chi Minh City 756636, Vietnam

[3] Osaka Prefecture Univ, Dept Phys Sci, Sakai, Osaka 5998531, Japan

来源：

APPLIED PHYSICS EXPRESS | 2016年 / 9卷 / 12期

关键词：

TEMPERATURE; RESONANCE; PRESSURE; SILICON; SENSORS;

D O I：

10.7567/APEX.9.126601

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A theory of enhancing thermally induced effects on atomic force microscope cantilevers with respect to the input power is proposed. An optical microcavity is used to increase the absorbed power and radiation pressure on thin films. We show that the response to the input power is enhanced up to an order of magnitude for cantilevers of similar to 200 mu m in length and similar to 0.5 mu m in thickness. A decrease in the absorbed power in the presence of cantilever deflection increases system endurability with respect to the input power. The study gives methods for amplifying and tuning vibration amplitudes in amplitude modulation modes with high sensitivity and low controlling input power. (C) 2016 The Japan Society of Applied Physics

引用

页数：4