Development of achromatic full-field X-ray microscopy with compact imaging mirror system

被引：1

作者：

Matsuyama, S. ^{[1
]}

Emi, Y. ^{[1
]}

Kino, H. ^{[1
]}

Sano, Y. ^{[1
]}

Kohmura, Y. ^{[2
]}

Tamasaku, K. ^{[2
]}

Yabashi, M. ^{[2
]}

Ishikawa, T. ^{[2
]}

Yamauchi, K. ^{[1
,3
]}

机构：

[1] Osaka Univ, Grad Sch Engn, Dept Precis Sci & Technol, 2-1 Yamada Oka, Suita, Osaka 5650871, Japan

[2] RIKEN, SPring 8, Mikazuki, Hyogo 6795148, Japan

[3] Osaka Univ, Grad Sch Engn, Res Ctr Ultra Precis Sci & Technol, Osaka 5650871, Japan

来源：

X-RAY NANOIMAGING: INSTRUMENTS AND METHODS | 2013年 / 8851卷

基金：

日本科学技术振兴机构;

关键词：

advanced Kirkpatrick-Baez optics; Wolter mirror; full-field X-ray microscopy; X-ray mirror; OPTICS; INTERFEROMETRY;

D O I：

10.1117/12.2023152

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Compact advanced Kirkpatrick-Baez optics are used to construct a microscope that is easy to align and robust against vibrations and thermal drifts. The entire length of the imaging mirror system is 286 mm, which is 34% shorter than the previous model. A spatial resolution test is performed in which magnified bright-field images of a pattern are taken with an X-ray camera at an energy of 10 keV at the BL29XUL beamline of SPring-8. A line-and-space pattern having a 50-nm width could be resolved, although the image contrast is low.

引用

页数：8

共 50 条

[1] Development of concave-convex imaging mirror system for a compact and achromatic full-field X-ray microscope
Yamada, Jumpei
Matsuyama, Satoshi
Yasuda, Shuhei
Sano, Yasuhisa
Kohmura, Yoshiki
Yabashi, Makina
Ishikawa, Tetsuya
Yamauchi, Kazuto
ADVANCES IN X-RAY/EUV OPTICS AND COMPONENTS XII, 2017, 10386
[2] Simulation of concave-convex imaging mirror system for development of a compact and achromatic full-field x-ray microscope
Yamada, Jumpei
Matsuyama, Satoshi
Sano, Yasuhisa
Yamauchi, Kazuto
APPLIED OPTICS, 2017, 56 (04) : 967 - 974
[3] Development of a one-dimensional Wolter mirror for achromatic full-field X-ray microscopy
Matsuyama, S.
Kidani, N.
Mimura, H.
Kim, J.
Sano, Y.
Tamasaku, K.
Kohmura, Y.
Yabashi, M.
Ishikawa, T.
Yamauchi, K.
ADVANCES IN X-RAY/EUV OPTICS AND COMPONENTS VI, 2011, 8139
[4] Magnetic imaging with full-field soft X-ray microscopy
Fischer, P.
Eimüller, T.
Goll, D.
Stoll, H.
Puzic, A.
Schütz, G.
Denbeaux, G.
International Journal of Materials Research, 2002, 93 (05) : 377 - 382
[5] Magnetic imaging with full-field soft X-ray microscopy
Fischer, P
Eimüller, T
Goll, D
Stoll, H
Puzic, A
Schütz, G
Denbeaux, G
ZEITSCHRIFT FUR METALLKUNDE, 2002, 93 (05): : 377 - 382
[6] Full-field x-ray fluorescence imaging microscope with a Wolter mirror
Takeuchi, A
Aoki, S
Yamamoto, K
Takano, H
Watanabe, N
Ando, M
REVIEW OF SCIENTIFIC INSTRUMENTS, 2000, 71 (03): : 1279 - 1285
[7] Development of achromatic full-field hard X-ray microscopy and its application to X-ray absorption near edge structure spectromicroscopy
Matsuyama, S.
Emi, Y.
Kino, H.
Kohmura, Y.
Yabashi, M.
Ishikawa, T.
Yamauchi, K.
ADVANCES IN X-RAY/EUV OPTICS AND COMPONENTS IX, 2014, 9207
[8] Development of an achromatic full-field hard X-ray microscope using two monolithic imaging mirrors
Matsuyama, S.
Kino, H.
Yasuda, S.
Kohmura, Y.
Okada, H.
Yabashi, M.
Ishikawa, T.
Yamauchi, K.
X-RAY NANOIMAGING: INSTRUMENTS AND METHODS II, 2015, 9592
[9] Full-field transmission x-ray microscopy for bio-imaging
Andrews, J. C.
Brennan, S.
Liu, Y.
Pianetta, P.
Almeida, E. A. C.
van der Meulen, M. C. H.
Wu, Z.
Mester, Z.
Ouerdane, L.
Gelb, J.
Feser, M.
Rudati, J.
Tkachuk, A.
Yun, W.
9TH INTERNATIONAL CONFERENCE ON X-RAY MICROSCOPY, 2009, 186
[10] Development of achromatic full-field hard X-ray microscopy using four total-reflection mirrors
Matsuyama, S.
Emi, Y.
Kohmura, Y.
Tamasaku, K.
Yabashi, M.
Ishikawa, T.
Yamauchi, K.
11TH INTERNATIONAL CONFERENCE ON X-RAY MICROSCOPY (XRM2012), 2013, 463

← 1 2 3 4 5 →