Dynamic response of low aspect ratio piezoelectric microcantilevers actuated in different liquid environments

被引：23

作者：

Vazquez, J. ^{[1
]}

Rivera, M. A. ^{[1
]}

Hernando, J. ^{[1
]}

Sanchez-Rojas, J. L. ^{[1
]}

机构：

[1] ETSI Ind, Dpto Ingn Elect Elect Automat & Comunicac, Ciudad Real 13071, Spain

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2009年 / 19卷 / 01期

关键词：

ATOMIC-FORCE MICROSCOPY; FREQUENCY-RESPONSE; VISCOSITY; GLYCEROL;

D O I：

10.1088/0960-1317/19/1/015020

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The response of commercial piezoelectric AFM probes for potential applications in the field of chemical or biological sensors operating in liquids is investigated using laser Doppler vibrometry. The present work investigates the roles played in the frequency response by the density and the viscosity of different water-glycerol mixtures, in a frequency range of up to 1 MHz in air. Since the width of the tested probes is relatively large (and hence the aspect ratio remains small), inertial loading effects dominate viscous effects, unlike in cantilevers characterized by larger aspect ratios. Measurements are compared with results provided by a simplified computer model of a probe immersed in an inviscid surrounding fluid.

引用

页数：9

共 37 条

[1] Resonance of electrostatically actuated thin-film amorphous silicon microelectromechanical systems microresonators in aqueous solutions: Effect of solution conductivity and viscosity
Adrega, T.
Chu, V.
Conde, J. P.
[J]. JOURNAL OF APPLIED PHYSICS, 2007, 101 (09)
[2] The frequency response of a rectangular cantilever plate vibrating in a viscous fluid
Atkinson, C.
de Lara, M. Manrique
[J]. JOURNAL OF SOUND AND VIBRATION, 2007, 300 (1-2) : 352 - 367
[3] Hydrodynamic loading of microcantilevers vibrating in viscous fluids
Basak, Sudipta
Raman, Arvind
Garimella, Suresh V.
[J]. JOURNAL OF APPLIED PHYSICS, 2006, 99 (11)
[4] Batchelor GK., 1987, An introduction to fluid mechanics
[5] New glycerol tables - Tables for specific gravity and per cent of glycerol - Thermal expansion of aqueous solutions in terms of specific gravity
Bosart, LW
Snoddy, AO
[J]. INDUSTRIAL AND ENGINEERING CHEMISTRY, 1927, 19 (01): : 506 - 510
[6] Experimental validation of theoretical models for the frequency response of atomic force microscope cantilever beams immersed in fluids
Chon, JWM
Mulvaney, P
Sader, JE
[J]. JOURNAL OF APPLIED PHYSICS, 2000, 87 (08) : 3978 - 3988
[7] Modal analysis of microcantilever sensors with environmental damping
Dareing, DW
Thundat, T
Jeon, SM
Nicholson, M
[J]. JOURNAL OF APPLIED PHYSICS, 2005, 97 (08)
[8] Microresonator mass sensors for detection of Bacillus anthracis Sterne spores in air and water
Davila, Angelica P.
Jang, Jaesung
Gupta, Amit K.
Walter, Tom
Aronson, Arthur
Bashir, Rashid
[J]. BIOSENSORS & BIOELECTRONICS, 2007, 22 (12) : 3028 - 3035
[9] Enhanced functionality of cantilever based mass sensors using higher modes
Dohn, S
Sandberg, R
Svendsen, W
Boisen, A
[J]. APPLIED PHYSICS LETTERS, 2005, 86 (23) : 1 - 3
[10] Resonating modes of vibrating microcantilevers in liquid
Ghatkesar, Murali Krishna
Braun, Thomas
Barwich, Viola
Ramseyer, Jean-Pierre
Gerber, Christoph
Hegner, Martin
Lang, Hans Peter
[J]. APPLIED PHYSICS LETTERS, 2008, 92 (04)

← 1 2 3 4 →