Study on Creep Hysteresis Characteristics of Piezoelectric Ceramics in the Nano-positioning Stage

Piezoelectric ceramics has the advantages of fast response and high resolution of displacement, and is widely used in ultra-precision machining and positioning. In the nano-positioning stage of super-resolution microscopic system, the piezoelectric ceramic drives the flexible hinge to achieve the precise displacement of the sample. In order to realize the precise control of piezoelectric ceramics, it is necessary to grasp the nonlinear characteristics such as creep and hysteresis of piezoelectric ceramics to establish its mathematical model. Through experimental study on the creep characteristic in time domain, it is identified that the piezoelectric ceramics have the basically coincident relative creep rate in the operating voltage range, the mathematical model of the piezoelectric creep is established to weaken the influence of hysteresis, The experimental results show that the corrected hysteresis model has a good matching degree.