Local temperature determination in power loaded surface acoustic wave structures using Raman spectroscopy

被引：6

作者：

Spindler, M. ^{[1
]}

Uhlig, B. ^{[2
]}

Menzel, S. B. ^{[1
]}

Huck, C. ^{[3
,4
]}

Gemming, T. ^{[1
]}

Eckert, J. ^{[1
]}

机构：

[1] IFW Dresden, Inst Complex Mat, D-01171 Dresden, Germany

[2] Fraunhofer Ctr Nanoelect Technol IPMS CNT, D-01099 Dresden, Germany

[3] Univ Augsburg, Inst Phys, D-86159 Augsburg, Germany

[4] TDK Corp, D-81671 Munich, Germany

来源：

JOURNAL OF APPLIED PHYSICS | 2013年 / 114卷 / 16期

关键词：

DEPENDENCE; SCATTERING; STOKES; RATIO;

D O I：

10.1063/1.4827835

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The temperature at the surface of surface acoustic wave (SAW) devices is a critical parameter not only for their design but also for the understanding of failure mechanisms like acoustomigration. We report about a contactless measurement method using Raman spectroscopy for the temperature determination on interdigital transducers (IDTs) of SAW test structures. A power load of up to 3.5W/mm(2) at an operating frequency of 130 MHz was used to generate travelling Rayleigh waves on a lithium niobate 128 degrees YX substrate. Here, the local temperature on the surface between the finger electrodes of the IDT increases by 60 K. In addition to Raman spectroscopy, the reversible shift of the resonance frequency of the SAW test structure was used to determine and calibrate the local temperature of external loaded samples. These experiments show good agreement with temperatures obtained by Raman spectroscopy based evaluations. (C) 2013 AIP Publishing LLC.

引用

页数：5

共 12 条

[1] Invited Article: Simultaneous mapping of temperature and stress in microdevices using micro-Raman spectroscopy [J].

Beechem, Thomas ;

Graham, Samuel ;

Kearney, Sean P. ;

Phinney, Leslie M. ;

Serrano, Justin R. .

REVIEW OF SCIENTIFIC INSTRUMENTS, 2007, 78 (06)

[2]

Dathe K., 1973, J PRAKT CHEM, V315, P991

[3]

Hashimoto K., 2000, Surface Acoustic Wave Devices in Telecommunications, P221, DOI DOI 10.1073/pnas.1404462111

[4] Temperature measurement from the intensity ratio of the Raman-scattering lines in carbon tetrachloride constituting the liquid core of an optical fiber [J].

Huang Baokun ;

Tian Yanjie ;

Li Zuowei ;

Gao Shuquin ;

Li Zhaokai .

INSTRUMENTS AND EXPERIMENTAL TECHNIQUES, 2007, 50 (02) :282-285

[5] DETERMINATION OF THE LOCAL TEMPERATURE AT A SAMPLE DURING RAMAN EXPERIMENTS USING STOKES AND ANTI-STOKES RAMAN BANDS [J].

KIP, BJ ;

MEIER, RJ .

APPLIED SPECTROSCOPY, 1990, 44 (04) :707-711

[6] STOKES ANTI-STOKES RAMAN VIBRATIONAL TEMPERATURES - REFERENCE MATERIALS, STANDARD LAMPS, AND SPECTROPHOTOMETRIC CALIBRATIONS [J].

MALYJ, M ;

GRIFFITHS, JE .

APPLIED SPECTROSCOPY, 1983, 37 (04) :315-333

[7] Temperature dependence of the Raman modes in LiNbO3 and mechanism of the phase transition [J].

Ridah, A ;

Fontana, MD ;

Bourson, P .

PHYSICAL REVIEW B, 1997, 56 (10) :5967-5973

[8] RAMAN SCATTERING BY LITHIUM NIOBATE [J].

SCHAUFELE, RF ;

WEBER, MJ .

PHYSICAL REVIEW, 1966, 152 (02) :705-+

[9] DETERMINATION OF THE LI/NB RATIO IN LITHIUM-NIOBATE BY MEANS OF BIREFRINGENCE AND RAMAN MEASUREMENTS [J].

SCHLARB, U ;

KLAUER, S ;

WESSELMANN, M ;

BETZLER, K ;

WOHLECKE, M .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1993, 56 (04) :311-315

[10]

Schmidt H, 2001, ULTRASON, P97, DOI 10.1109/ULTSYM.2001.991587

← 1 2 →