Plasma enhanced aerosol-gel deposition of Al2O3 coatings

被引：9

作者：

Pietrzyk, Bozena ^{[1
]}

Miszczak, Sebastian ^{[1
]}

Szymanowski, Hieronim ^{[1
]}

Kucharski, Daniel ^{[1
]}

机构：

[1] Tech Univ Lodz, Inst Mat Sci & Engn, PL-90924 Lodz, Poland

来源：

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY | 2013年 / 33卷 / 12期

关键词：

Aerosol-gel; Sol-gel; Plasma treatment; Alumina; ALUMINA COATINGS; EVOLUTION; FILMS;

D O I：

10.1016/j.jeurceramsoc.2013.02.012

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The new plasma enhanced aerosol-gel technique has been used for alumina films preparation, in this work. This process integrates aerosol-gel deposition of films and their plasma treatment in one reactor. The alumina films deposited by aerosol gel method on Si substrate were plasma or thermally treated. The influence of deposition and condensation conditions on properties of the films was studied. Produced coatings were characterized in terms of surface morphology (SEM, AFM) as well as crystalline and chemical structure (FTIR, XRD). Plasma discharge used for modification of the substrates prior to the deposition process improved homogeneity of produced coatings. Coatings obtained at room temperature exhibit boehmite structure which was transformed into gamma-Al2O3 after annealing. A similar transformation was induced by low temperature oxide plasma discharge treatment for sufficiently thin coatings. (C) 2013 Elsevier Ltd. All rights reserved.

引用

页码：2341 / 2346

页数：6

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