Plasma enhanced aerosol-gel deposition of Al2O3 coatings

被引：8

作者：

Pietrzyk, Bozena ^{[1
]}

Miszczak, Sebastian ^{[1
]}

Szymanowski, Hieronim ^{[1
]}

Kucharski, Daniel ^{[1
]}

机构：

[1] Tech Univ Lodz, Inst Mat Sci & Engn, PL-90924 Lodz, Poland

来源：

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY | 2013年 / 33卷 / 12期

关键词：

Aerosol-gel; Sol-gel; Plasma treatment; Alumina; ALUMINA COATINGS; EVOLUTION; FILMS;

D O I：

10.1016/j.jeurceramsoc.2013.02.012

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The new plasma enhanced aerosol-gel technique has been used for alumina films preparation, in this work. This process integrates aerosol-gel deposition of films and their plasma treatment in one reactor. The alumina films deposited by aerosol gel method on Si substrate were plasma or thermally treated. The influence of deposition and condensation conditions on properties of the films was studied. Produced coatings were characterized in terms of surface morphology (SEM, AFM) as well as crystalline and chemical structure (FTIR, XRD). Plasma discharge used for modification of the substrates prior to the deposition process improved homogeneity of produced coatings. Coatings obtained at room temperature exhibit boehmite structure which was transformed into gamma-Al2O3 after annealing. A similar transformation was induced by low temperature oxide plasma discharge treatment for sufficiently thin coatings. (C) 2013 Elsevier Ltd. All rights reserved.

引用

页码：2341 / 2346

页数：6

共 50 条

[21] Relationship Between Impact Velocity of Al2O3 Particles and Deposition Efficiency in Aerosol Deposition Method [J].

Kazuaki Naoe ;

Masashi Nishiki ;

Atsushi Yumoto .

Journal of Thermal Spray Technology, 2013, 22 :1267-1274

[22] Relationship Between Impact Velocity of Al2O3 Particles and Deposition Efficiency in Aerosol Deposition Method [J].

Naoe, Kazuaki ;

Nishiki, Masashi ;

Yumoto, Atsushi .

JOURNAL OF THERMAL SPRAY TECHNOLOGY, 2013, 22 (08) :1267-1274

[23] Solution Precursor Plasma Spraying of Cr-Doped Al2O3 Thermochromic Coatings [J].

Tesar, Tomas ;

Musalek, Radek ;

Lukac, Frantisek ;

Medricky, Jan ;

Cizek, Jan ;

Csaki, Stefan ;

Panak, Ondrej ;

Drzkova, Marketa .

JOURNAL OF THERMAL SPRAY TECHNOLOGY, 2020, 29 (1-2) :199-211

[24] Atomic layer deposition of Al2O3 and Al2O3/TiO2 barrier coatings to reduce the water vapour permeability of polyetheretherketone [J].

Ahmadzada, Tamkin ;

McKenzie, David R. ;

James, Natalie L. ;

Yin, Yongbai ;

Li, Qing .

THIN SOLID FILMS, 2015, 591 :131-136

[25] Development of mullite and mullite/Al2O3 precursor sols for electrophoretic deposition of oxidation protection coatings [J].

Moritz, Kirsten ;

Herbig, Reinhard ;

Damjanovic, Tanja ;

Argirusis, Christos ;

Borchardt, Guenter .

COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS, 2009, 350 (1-3) :13-21

[26] Uniform Atomic Layer Deposition of Al2O3 on Graphene by Reversible Hydrogen Plasma Functionalization [J].

Vervuurt, Rene H. J. ;

Karasulu, Bora ;

Verheijen, Marcel A. ;

Kessels, Wilhelmus M. M. ;

Bol, Ageeth A. .

CHEMISTRY OF MATERIALS, 2017, 29 (05) :2090-2100

[27] Fabrication of graphene oxide reinforced plasma sprayed Al2O3 coatings [J].

Li, Yufeng ;

Liu, Jialin ;

Deng, Jiashun ;

He, Jining ;

Qin, Yanfang ;

Xing, Yue ;

Yin, Fuxing .

CERAMICS INTERNATIONAL, 2023, 49 (02) :1667-1677

[28] The effect of the α/γ phase on the dielectric properties of plasma sprayed Al2O3 coatings [J].

Gao, Jianyi ;

Xiong, Xuanyue ;

Gao, Yang .

JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2017, 28 (16) :12015-12020

[29] Mechanical and in vitro testing of aerosol-gel deposited titania coatings for biocompatible applications [J].

Manso, M ;

Ogueta, S ;

García, P ;

Pérez-Rigueiro, J ;

Jiménez, C ;

Martínez-Duart, JM ;

Langlet, M .

BIOMATERIALS, 2002, 23 (02) :349-356

[30] Plasma sprayed coatings of glass microspheres premixed with Al2O3 particles [J].

Gupta, G. ;

Satapathy, A. .

SURFACE ENGINEERING, 2013, 29 (10) :755-760

← 1 2 3 4 5 →