Fabrication and Characterization of Lithographically Patterned and Optically Transparent Anodic Aluminum Oxide (AAO) Nanostructure Thin Film

被引：12

作者：

He, Yuan ^{[1
]}

Li, Xiang ^{[1
]}

Que, Long ^{[1
]}

机构：

[1] Louisiana Tech Univ, Inst Micromfg, Ruston, LA 71272 USA

来源：

JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY | 2012年 / 12卷 / 10期

基金：

美国国家科学基金会;

关键词：

Optically Transparent Nanostructure Thin Film; Lithographically Patterned Anodic Aluminum Oxide Nanopores; Anodization; FABRY-PEROT-INTERFEROMETER; SULFURIC-ACID; LARGE-AREA; ARRAYS; TEMPLATES; MEMBRANES;

D O I：

10.1166/jnn.2012.6595

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Optically transparent anodic aluminum oxide (AAO) nanostructure thin film has been successfully fabricated from lithographically patterned aluminum on indium tin oxide (ITO) glass substrates for the first time, indicating the feasibility to integrate the AAO nanostructures with microdevices or microfluidics for a variety of applications. Both one-step and two-step anodization processes using sulfuric acid and oxalic acid have been utilized for fabricating the AAO nanostructure thin film. The optical properties of the fabricated AAO nanostructure thin film have been evaluated and analyzed.

引用

页码：7915 / 7921

页数：7

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