Development of a conductivity microsensor considering electric double layer capacity

被引：3
作者：
Janous, Jiri [1 ]
Beranek, Pavel [1 ]
Pribyl, Michal [1 ,2 ]
Snita, Dalimil [1 ,2 ]
机构：
[1] Inst Chem Technol, Dept Chem Engn, CR-16628 Prague, Czech Republic
[2] Univ W Bohemia, Res Ctr New Technol, Plzen 30614, Czech Republic
来源：
MICROELECTRONIC ENGINEERING | 2012年 / 97卷
关键词：
Electric double layer; Micro-fluidics; Micro-electrodes; Conductivity sensors; Impedance spectroscopy; ELECTROCHEMICAL IMPEDANCE SPECTROSCOPY; PHASE ELEMENT BEHAVIOR; INTERFACES; CPE; DETECTOR;
D O I：
10.1016/j.mee.2012.05.008
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
An electrochemical sensor of a novel design has been developed for the electric sensing of conductive particles in a solution. System is made of PMMA plastic (plexiglass) by means of UV lithography and galvanic electroplating to assure a low manufacturing cost. Our sensor consists of a gold microelectrode array embedded in plexiglass. Sensor design allows the simple integration of control electronics. Sensor characteristics were investigated by the impedance spectroscopy and its functionality examined by the conductivity measurement. The effect of ion concentration on the impedance spectra was studied. Three electrode fields with different characteristic electrode dimension of 250, 100 and 50 mu m were manufactured and scale-down effects were verified. The impedance responses of the sensor are interpreted through an equivalent RC circuit. Capacitive dispersion of the electric double layer (EDL) impedance was discovered and the substitution by the constant phase element (CPE) is discussed. (c) 2012 Elsevier B.V. All rights reserved.
引用
收藏
页码：387 / 390
页数：4
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