Quantitative compositional analysis of organic thin films using transmission NEXAFS spectroscopy in an X-ray microscope

Near edge X-ray absorption fine structure (NEXAFS) spectroscopy is well suited for the quantitative determination of the composition of soft matter thin films. Combined with the high spatial resolution of a scanning transmission X-ray microscope, compositional maps of submicron morphologies can be derived and have been used successfully to characterize a number of materials systems. However, multiple sources of known systematic errors limit the accuracy and are frequently not taken into account. We show that these errors can be significant (more than 10%) and demonstrate simple methods to eliminate them. With suitable precautions, a compositional measurement can be made on a thin film sample in a matter of minutes with sub-micron spatial resolution and sub-percent compositional precision. NEXAFS measurements are furthermore known to be sensitive to anisotropic molecular orientation and a strategy to account for that and extract preferential molecular orientation relative to a reference is presented. The spatial resolution of the measurement can be increased to below 100 nm at the expense of compositional precision, depending on the point spread function of the zone plate focusing optics of the microscope. (c) 2012 Elsevier B.V. All rights reserved.