Wavelength selective uncooled infrared sensor by plasmonics

被引：120

作者：

Ogawa, Shinpei ^{[1
]}

Okada, Kazuya ^{[2
]}

Fukushima, Naoki ^{[2
]}

Kimata, Masafumi ^{[2
]}

机构：

[1] Mitsubishi Electr Corp, Adv Technol R&D Ctr, Amagasaki, Hyogo 6618661, Japan

[2] Ritsumeikan Univ, Coll Sci & Engn, Kusatsu, Shiga 5258577, Japan

来源：

APPLIED PHYSICS LETTERS | 2012年 / 100卷 / 02期

关键词：

MICROBOLOMETERS; TRANSMISSION; ARRAYS;

D O I：

10.1063/1.3673856

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A wavelength selective uncooled infrared (IR) sensor using two-dimensional plasmonic crystals (2D PLCs) has been developed. The numerical investigation of 2D PLCs demonstrates that the wavelength of absorption can be mainly controlled by the period of the surface structure. A microelectromechanical systems-based uncooled IR sensor with 2D PLCs as the IR absorber was fabricated through a complementary metal oxide semiconductor and a micromachining technique. The selective enhancement of responsivity was observed at the wavelength that coincided with the period of the 2D-PLC absorber. (C) 2012 American Institute of Physics. [doi: 10.1063/1.3673856]

引用

页数：4

共 18 条

[1] How Holes Can Obscure the View: Suppressed Transmission through an Ultrathin Metal Film by a Subwavelength Hole Array [J].

Braun, Julia ;

Gompf, Bruno ;

Kobiela, Georg ;

Dressel, Martin .

PHYSICAL REVIEW LETTERS, 2009, 103 (20)

[2] Quenched optical transmission in ultrathin subwavelength plasmonic gratings [J].

D'Aguanno, G. ;

Mattiucci, N. ;

Alu, A. ;

Bloemer, M. J. .

PHYSICAL REVIEW B, 2011, 83 (03)

[3] Extraordinary optical transmission through sub-wavelength hole arrays [J].

Ebbesen, TW ;

Lezec, HJ ;

Ghaemi, HF ;

Thio, T ;

Wolff, PA .

NATURE, 1998, 391 (6668) :667-669

[4] Light in tiny holes [J].

Genet, C. ;

Ebbesen, T. W. .

NATURE, 2007, 445 (7123) :39-46

[5]

Gianchandani Y., 2008, COMPREHENSIVE MICROS, V3, P113

[6] Free-standing subwavelength metallic gratings for snapshot multispectral imaging [J].

Haidar, Riad ;

Vincent, Gregory ;

Collin, Stephane ;

Bardou, Nathalie ;

Guerineau, Nicolas ;

Deschamps, Joel ;

Pelouard, Jean-Luc .

APPLIED PHYSICS LETTERS, 2010, 96 (22)

[7] Design of infrared wavelength-selective microbolometers using planar multimode detectors [J].

Han, SW ;

Kim, JW ;

Sohn, YS ;

Neikirk, DP .

ELECTRONICS LETTERS, 2004, 40 (22) :1410-1411

[8] High performance optical absorber based on a plasmonic metamaterial [J].

Hao, Jiaming ;

Wang, Jing ;

Liu, Xianliang ;

Padilla, Willie J. ;

Zhou, Lei ;

Qiu, Min .

APPLIED PHYSICS LETTERS, 2010, 96 (25)

[9] Plasmonic blackbody: Almost complete absorption of light in nanostructured metallic coatings [J].

Kravets, V. G. ;

Schedin, F. ;

Grigorenko, A. N. .

PHYSICAL REVIEW B, 2008, 78 (20)

[10] Multispectral microbolometers for the midinfrared [J].

Maier, Thomas ;

Brueckl, Hubert .

OPTICS LETTERS, 2010, 35 (22) :3766-3768

← 1 2 →