Enhanced Humidity Sensitivity with Silicon Nanopillar Array by UV Light

被引：8

作者：

Li, Wei ^{[1
,2
,3
]}

Ding, Chao ^{[1
,2
]}

Cai, Yun ^{[1
,2
]}

Liu, Juyan ^{[1
,2
]}

Wang, Linlin ^{[1
,2
]}

Ren, Qingying ^{[1
,2
]}

Xu, Jie ^{[1
,2
]}

机构：

[1] Nanjing Univ Posts & Telecommun, Coll Elect & Opt Engn, State Prov Joint Engn Lab RF Integrat & Micropack, Nanjing 210023, Jiangsu, Peoples R China

[2] Nanjing Univ Posts & Telecommun, Coll Microelect, Nanjing 210023, Jiangsu, Peoples R China

[3] Southeast Univ, State Key Lab Millimeter Waves, Nanjing 210096, Jiangsu, Peoples R China

来源：

SENSORS | 2018年 / 18卷 / 02期

关键词：

silicon nanopillar; humidity sensing; UV light; SENSING PROPERTIES; SENSOR; NANOWIRES; TECHNOLOGIES; SURFACE;

D O I：

10.3390/s18020660

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

The sensitivity of silicon nanopillar array for relative humidity (RH) with UV illumination was investigated in this work. The silicon nanopillar array was prepared by nanosphere lithography. Electrical measurements were performed on its sensing performance with and without UV irradiation. It was found that UV light improved the humidity sensitivity with different UV light wavelengths and power. The sensor response and recovery time were reduced. Furthermore, the turn-on threshold voltage and the operating voltage both decreased. These sensing characteristics can mainly be attributed to the electron-hole pairs generated by UV light. These electron-hole pairs promote the adsorption and desorption processes. The results indicate that silicon nanopillar array materials with UV irradiation might be competitive as novel sensing materials for fabricating humidity sensors with high performances.

引用

页数：10

共 26 条

[1] Ultrafast Graphene Oxide Humidity Sensors [J].