High efficiency, large-active-area superconducting nanowire single-photon detectors

被引：6

作者：

Gu Min ^{[1
]}

Zhang La-Bao ^{[1
]}

Kang Lin ^{[1
]}

Zhao Qing-Yuan ^{[1
]}

Jia Tao ^{[1
]}

Wan Chao ^{[1
]}

Xu Rui-Ying ^{[1
]}

Yang Xiao-Zhong ^{[1
]}

Wu Pei-Heng ^{[1
]}

Zhang Yong ^{[2
,3
]}

Xia Jin-Song ^{[2
,3
]}

机构：

[1] Nanjing Univ, RISE, Sch Elect Sci & Engn, Nanjing 210093, Jiangsu, Peoples R China

[2] Huazhong Univ Sci & Technol, Wuhan Natl Lab Optoelect, Wuhan 430074, Peoples R China

[3] Huazhong Univ Sci & Technol, Sch Opt & Elect Informat, Wuhan 430074, Peoples R China

来源：

CHINESE PHYSICS B | 2015年 / 24卷 / 06期

关键词：

single photon; superconductor; nanowire; ELECTRON-BEAM LITHOGRAPHY; SYSTEM EFFICIENCY; INFRARED PHOTONS;

D O I：

10.1088/1674-1056/24/6/068501

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

Niobium nitride superconducting nanowire single-photon detectors were fabricated on thermally oxidized silicon substrates with large active areas of 30 mu m x 30 mu m. To achieve non-constricted detectors, we improved the film growth and electron beam lithography process to fabricate uniform 100-nm wide NbN nanowires with a fill factor of 50%. The devices showed 72.4% system detection efficiency (SDE) at 100-Hz dark count rate (DCR) and 74-ps timing jitter, measured at the fiber communication wavelength of 1550 nm. The highest SDE which is 81.2% when the DCR is similar to 700 c/s appears at the wavelength of 1650 nm.

引用

页数：5

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