Graphene interconnects fully encapsulated in layered insulator hexagonal boron nitride

被引:35
作者
Jain, Nikhil [1 ]
Durcan, Chris A. [1 ]
Jacobs-Gedrim, Robin [1 ]
Xu, Yang [2 ]
Yu, Bin [1 ]
机构
[1] SUNY Albany, Coll Nanoscale Sci & Engn, Albany, NY 12203 USA
[2] Zhejiang Univ, Inst Microelect & Optoelect, Hangzhou 310027, Zhejiang, Peoples R China
基金
美国国家科学基金会;
关键词
PERFORMANCE; LIMITS; RESISTIVITY; DIMENSIONS; RESISTANCE; TRANSPORT; NM;
D O I
10.1088/0957-4484/24/35/355202
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
We demonstrate improvements in the electrical performance of graphene interconnects with full encapsulation by lattice-matching layered insulator, hexagonal boron nitride (h-BN). A novel layer-based transfer method is developed to assemble the top passivating layer of h-BN on the graphene surface to construct the h-BN/graphene/h-BN heterostructures. The encapsulated graphene interconnects (EGIs) are characterized and compared with graphene interconnects on either SiO2 or h-BN substrates with no top passivating h-BN layer. We observe significant improvements in both the maximum current density and breakdown voltage in EGIs. Compared with the uncovered structures, EGIs also show an appreciable increase (similar to 67%) in power density at breakdown. These improvements are achieved without degrading the carrier transport characteristics in graphene wires. In addition, EGIs exhibit a minimal environment impact, showing electrical behavior insensitive to ambient conditions.
引用
收藏
页数:5
相关论文
共 30 条
  • [1] Carbon Nanotube Interconnects for Low-Power High-Speed Applications
    Alam, Naushad
    Kureshi, A. K.
    Hasan, Mohd
    Arslan, T.
    [J]. ISCAS: 2009 IEEE INTERNATIONAL SYMPOSIUM ON CIRCUITS AND SYSTEMS, VOLS 1-5, 2009, : 2273 - +
  • [2] [Anonymous], EL DEV M IEDM 2011 I
  • [3] 3-D ICs: A novel chip design for improving deep-submicrometer interconnect performance and systems-on-chip integration
    Banerjee, K
    Souri, SJ
    Kapur, P
    Saraswat, KC
    [J]. PROCEEDINGS OF THE IEEE, 2001, 89 (05) : 602 - 633
  • [4] Ultrahigh electron mobility in suspended graphene
    Bolotin, K. I.
    Sikes, K. J.
    Jiang, Z.
    Klima, M.
    Fudenberg, G.
    Hone, J.
    Kim, P.
    Stormer, H. L.
    [J]. SOLID STATE COMMUNICATIONS, 2008, 146 (9-10) : 351 - 355
  • [5] Influence of line dimensions on the resistance of Cu interconnections
    Chen, F
    Gardner, D
    [J]. IEEE ELECTRON DEVICE LETTERS, 1998, 19 (12) : 508 - 510
  • [6] Charged-impurity scattering in graphene
    Chen, J. -H.
    Jang, C.
    Adam, S.
    Fuhrer, M. S.
    Williams, E. D.
    Ishigami, M.
    [J]. NATURE PHYSICS, 2008, 4 (05) : 377 - 381
  • [7] Intrinsic and extrinsic performance limits of graphene devices on SiO2
    Chen, Jian-Hao
    Jang, Chaun
    Xiao, Shudong
    Ishigami, Masa
    Fuhrer, Michael S.
    [J]. NATURE NANOTECHNOLOGY, 2008, 3 (04) : 206 - 209
  • [8] Interconnect limits on gigascale integration (GSI) in the 21st century
    Davis, JA
    Venkatesan, R
    Kaloyeros, A
    Beylansky, M
    Souri, SJ
    Banerjee, K
    Saraswat, KC
    Rahman, A
    Reif, R
    Meindl, JD
    [J]. PROCEEDINGS OF THE IEEE, 2001, 89 (03) : 305 - 324
  • [9] Boron nitride substrates for high-quality graphene electronics
    Dean, C. R.
    Young, A. F.
    Meric, I.
    Lee, C.
    Wang, L.
    Sorgenfrei, S.
    Watanabe, K.
    Taniguchi, T.
    Kim, P.
    Shepard, K. L.
    Hone, J.
    [J]. NATURE NANOTECHNOLOGY, 2010, 5 (10) : 722 - 726
  • [10] The rise of graphene
    Geim, A. K.
    Novoselov, K. S.
    [J]. NATURE MATERIALS, 2007, 6 (03) : 183 - 191