Numerical and experimental investigations into microchannel formation in glass substrate using electrochemical discharge machining

被引:38
作者
Mishra, Dileep Kumar [1 ]
Verma, Aman Kumar [1 ]
Arab, Julfekar [1 ]
Maria, Deepak [1 ]
Dixit, Pradeep [1 ]
机构
[1] Indian Inst Technol, Dept Mech Engn, Electrochem Microfabricat Lab, Mumbai 400076, Maharashtra, India
关键词
electrochemical discharge machining; microchannels; finite; element method; electrical discharge; micromachining;
D O I
10.1088/1361-6439/ab1da7
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Microchannels formed in non-conductive substrates like fused silica, glass and quartz, etc, have wide applications in the field of micro-fluidic and lab-on-chip applications due to their optical transparency, chemical inertness, and biocompatible nature. Electrochemical discharge machining (ECDM) has emerged as a potential low-cost fabrication method to fabricate microfeatures in these materials, compared to conventional laser etching techniques. In this paper, numerical simulation and experimental fabrication of microchannels in a glass substrate using the ECDM based micromilling technique is demonstrated. Stainless steel needle as tool electrode is used in alkaline electrolyte medium. The effects of process parameters viz. tool feed rate, pulse frequency and machining voltage on material removal rate (MRR) and surface roughness (SR) of the microchannels were analysed. The experimental results showed that the MRR and SR increases with an increase in machining voltage and tool feed rate but reduces with an increase in the pulse frequency. Simulations using FEM-based model showed similar trends in MRR with that of experiments. A comparison between the cross-section profiles obtained by the experimental work and predicted profile by the numerical simulation showed some deviation between them due to the Gaussian heat flux assumption in the numerical model. Optical images showed that KOH performance is comparatively better than NaOH with respect to thermal damage and width of cut. Further, multi-objective optimization was performed using utility theory coupled with Taguchi's method to optimize the process parameters. Moreover, the capability of the ECDM process was demonstrated in fabricating various other micro-features such as sinusoidal channel, letter engraving, etc in a glass substrate, which can be extended to other brittle materials like quartz, fused silica, ceramic, etc.
引用
收藏
页数:13
相关论文
共 21 条
  • [1] The machining gap during constant velocity-feed glass micro-drilling by Spark Assisted Chemical Engraving
    Abou Ziki, Jana D.
    Wuethrich, Rolf
    [J]. JOURNAL OF MANUFACTURING PROCESSES, 2015, 19 : 87 - 94
  • [2] Micro-texturing channel surfaces on glass with spark assisted chemical engraving
    Abou Ziki, Jana D.
    Didar, Tohid Fatanat
    Wuethrich, Rolf
    [J]. INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE, 2012, 57 : 66 - 72
  • [3] Fabrication of multiple through-holes in non-conductive materials by Electrochemical Discharge Machining for RF MEMS Packaging
    Arab, Julfekar
    Mishra, Dileep Kumar
    Kannojia, Harindra Kumar
    Adhale, Pratik
    Dixit, Pradeep
    [J]. JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 2019, 271 : 542 - 553
  • [4] Micro-structuring of glass with features less than 100 μm by electrochemical discharge machining
    Cao, Xuan Doan
    Kim, Bo Hyun
    Chu, Chong Nam
    [J]. PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2009, 33 (04): : 459 - 465
  • [5] Characterization and modeling of 2D-glass micro-machining by spark-assisted chemical engraving (SACE) with constant velocity
    Didar, Tohid Fatanat
    Dolatabadi, Ali
    Wuthrich, Rolf
    [J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2008, 18 (06)
  • [6] The application of dry photoresists in fabricating cost-effective tapered through-silicon vias and redistribution lines in a single step
    Dixit, Pradeep
    Salonen, Jaakko
    Pohjonen, Harri
    Monnoyer, Philippe
    [J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2011, 21 (02)
  • [7] A three-dimensional finite element simulation approach to analyze material removal in electrochemical discharge machining
    Goud, Mudimallana
    Sharma, Apurbba Kumar
    [J]. PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART C-JOURNAL OF MECHANICAL ENGINEERING SCIENCE, 2017, 231 (13) : 2417 - 2428
  • [8] A review on material removal mechanism in electrochemical discharge machining (ECDM) and possibilities to enhance the material removal rate
    Goud, Mudimallana
    Sharma, Apurbba Kumar
    Jawalkar, Chandrashekhar
    [J]. PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2016, 45 : 1 - 17
  • [9] Experimental and numerical investigations of machining depth for glass material in electrochemical discharge milling
    Hajian, Mansour
    Razfar, Mohammad Reza
    Movahed, Saeid
    Etefagh, Ardeshir Hemasian
    [J]. PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2018, 51 : 521 - 528
  • [10] An experimental study on the effect of magnetic field orientations and electrolyte concentrations on ECDM milling performance of glass
    Hajian, Mansour
    Razfar, Mohammad Reza
    Movahed, Saeid
    [J]. PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2016, 45 : 322 - 331