Optical profilometer with a standalone scanning sensor head

被引:6
作者
Bartoli, A [1 ]
Poggi, P [1 ]
Quercioli, F [1 ]
Tiribilli, B [1 ]
Vassalli, M [1 ]
机构
[1] Ist Nazl Ott Appl, I-50125 Florence, Italy
关键词
nondestructive testing; metrology; profilometry; sensors; optomechanical design; optoelectronics; optical systems; optical inspection;
D O I
10.1117/1.1417494
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
The use of compact disc (CD) pickups as distance sensors in optical profilometry is a well-established practice. The novelty of our device is the use of the built-in objective lens-tracking actuator of the pickup to perform a 1-D beam scanning of the sample. The profilometer prototype presented in this paper is made up of a standalone sensor-actuator optical head that can be easily positioned on samples of complex shapes with every orientation and can be operated by a remote control system. When 2-D scanning is unnecessary or even impossible, as for surface quality inspection of bulky mechanical pieces, a device that uses a CID pickup as both the sensor and the actuator is cheaper, faster, lighter, more compact, and more versatile than standard object-scanning setups that use xy translation stages. A lateral scan range of 800 mum and a vertical scan range of 160 mum are achieved. (C) 2001 Society of Photo-Optical Instrumentation Engineers.
引用
收藏
页码:2852 / 2859
页数:8
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