The utilization of low temperature co-fired ceramics (LTCC-ML) technology for meso-scale EMS, a simple thermistor based flow sensor

被引：65

作者：

Gongora-Rubio, M

Solá-Laguna, LM

Moffett, PJ

Santiago-Avilés, JJ

机构：

[1] Univ Penn, Moore Sch Elect Engn, Philadelphia, PA 19104 USA

[2] IPT, Sao Paulo, Brazil

[3] Dupont Co, Expt Stn, Wilmington, DE 19880 USA

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1999年 / 73卷 / 03期

关键词：

LTCC; meso-scale EMS; flow sensors;

D O I：

10.1016/S0924-4247(98)00238-6

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

For certain applications the small size characteristics of MEMS structures can be traded off for low cost production and high manufacturing yields. This is the realm of meso-scale (intermediate scale) electromechanical systems. Low temperature co-fired ceramic tape materials offers the potential of emulating a great deal of silicon MEMS technology at the meso scale level. In this article we show the design, construction, characterization and modeling of a thermistor based flow sensor totally constructed using LTCC tapes and the hybrid microelectronics technology. (C) 1999 Elsevier Science S.A. All rights reserved.

引用

页码：215 / 221

页数：7

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