ADAPTIVE ON-LINE SELF-CALIBRATION OF ERRORS IN MULTI-STAGE-NOISE-SHAPING (MASH) SIGMA-DELTA MODULATOR GYROSCOPE

This paper introduces a novel adaptive self-calibrated multistage-noise-shaping (MASH-like) electro mechanical sigma delta modulator sensing scheme for MEMS Coriolis gyroscope. The proposed system adopts an online adaptive MASH2-0 modulator for a MEMS tuning-fork gyroscope which without using any additional mechanical calibration method. It effectively removes quantization errors that leaks through at the output due to parameters mismatching between gyroscope sensing element imperfections and interface digital modulator. It also allows the correction of spectral distortion and gain mismatch in the signal path due to non-ideal signal transfer function. Results demonstrate that the proposed adaptive MASH2-0 gyroscope achieved an inherent system stability, better dynamic range and better noise performance when compared with a common 4th-order single loop EM-LAM gyroscope.