Study on indium phosphide nanowires grown by metal organic chemical vapor deposition and coated with aluminum oxides deposited by atomic layer deposition

被引:0
作者
Lohn, Andrew J. [1 ,2 ]
Dawson, Noel [3 ]
Cormia, Robert [4 ]
Fryauf, David [1 ,2 ]
Zhang, Junce [1 ,2 ]
Norris, Kate J. [1 ,2 ]
Kobayashi, Nobuhiko P. [1 ,2 ]
机构
[1] Univ Calif Santa Cruz, Baskin Sch Engn, Santa Cruz, CA 95064 USA
[2] Univ Calif Santa Cruz NASA Ames Res Ctr, Adv Studies Labs, Nanostruct Energy Convers Technol & Res NECT, Moffett Field, CA 94035 USA
[3] Univ New Mexico, Ctr High Technol Mat, Albuquerque, NM 87106 USA
[4] Foothill Coll, Engn Dept, Los Altos Hills, CA 94022 USA
来源
NANOEPITAXY: MATERIALS AND DEVICES IV | 2012年 / 8467卷
基金
美国国家科学基金会;
关键词
nanowire; passivation; ALD; MOCVD; InP; confinement;
D O I
10.1117/12.930525
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Semiconducting nanowires are promising materials for a variety of applications, many of which are in optoelectronics where their ability to use quantum confinement to tune transition energy levels and their ability to epitaxially grow on substrates with large lattice-mismatches enable unique opportunities. In addition, the large relative surface area of nanowire-based devices can be either a benefit as in, for example, sensor applications or challenges such as charge trapping, non-radiative recombination or Fermi-level pinning. In this study, indium phosphide nanowires grown by metal organic chemical vapor deposition were conformally coated with aluminum oxide by atomic layer deposition as a means of controlling the surface states within the indium phosphide region. Photoluminescence spectra from the coated nanowires show a strong blueshift and slight peak broadening as compared to uncoated nanowires despite their increased lateral dimension. This degree of blueshift is unlikely to have been caused by strain associated with the coating because of its relatively thin thickness (similar to 10 nm), and the x-ray diffraction profiles collected from the coated nanowires do not indicate the presence of substantial lattice deformation. It is more likely to be a result of altered chemical state at the surface; the uncoated nanowires have oxygen bound to both indium and phosphorus near the surface as confirmed in our X-ray photoelectron spectroscopy studies. Subsequent aluminum oxide deposition alters surface atomic bonding thereby modifying the states electronic responsible for optical properties in the nanowires.
引用
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页数:7
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