Here we report on a technique for anisotropic etching of silicon similar to the well established vapor-liquid-solid technique for the growth of semiconductor nanowires. By annealing a patterned gold line on a H terminated silicon surface, Si atoms diffuse into the Au to form a eutectic phase. Upon exposure to etchant gases the dissolved silicon reacts and desorbs from the eutectic phase causing additional silicon to diffuse from the substrate to re-establish the equilibrium eutectic composition. In this manner the patterned eutectic material becomes anisotropically etched into the silicon substrate, in a process we call solid liquid vapor etching.
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Northwestern Univ, Dept Chem, Evanston, IL 60208 USA
Northwestern Univ, Int Inst Nanotechnol, Evanston, IL 60208 USANorthwestern Univ, Dept Chem, Evanston, IL 60208 USA
Liu, Guoliang
Young, Kaylie L.
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Northwestern Univ, Dept Chem, Evanston, IL 60208 USA
Northwestern Univ, Int Inst Nanotechnol, Evanston, IL 60208 USANorthwestern Univ, Dept Chem, Evanston, IL 60208 USA
Young, Kaylie L.
Liao, Xing
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Northwestern Univ, Dept Mat Sci & Engn, Evanston, IL 60208 USANorthwestern Univ, Dept Chem, Evanston, IL 60208 USA
Liao, Xing
Personick, Michelle L.
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Northwestern Univ, Dept Chem, Evanston, IL 60208 USA
Northwestern Univ, Int Inst Nanotechnol, Evanston, IL 60208 USANorthwestern Univ, Dept Chem, Evanston, IL 60208 USA
Personick, Michelle L.
Mirkin, Chad A.
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Northwestern Univ, Dept Chem, Evanston, IL 60208 USA
Northwestern Univ, Int Inst Nanotechnol, Evanston, IL 60208 USA
Northwestern Univ, Dept Mat Sci & Engn, Evanston, IL 60208 USANorthwestern Univ, Dept Chem, Evanston, IL 60208 USA
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ITMO Univ, Fac Laser Photon & Optoelect, Kronverkskiy Prospect 49, St Petersburg 197101, RussiaITMO Univ, Fac Laser Photon & Optoelect, Kronverkskiy Prospect 49, St Petersburg 197101, Russia
Hijazi, Hadi
Zeghouane, Mohammed
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Univ Clermont Auvergne, CNRS, SIGMA Clermont, Inst Pascal, F-63000 Clermont Ferrand, FranceITMO Univ, Fac Laser Photon & Optoelect, Kronverkskiy Prospect 49, St Petersburg 197101, Russia
Zeghouane, Mohammed
Dubrovskii, Vladimir G.
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St Petersburg State Univ, Fac Phys, Univ Skaya Emb 13B, St Petersburg 199034, RussiaITMO Univ, Fac Laser Photon & Optoelect, Kronverkskiy Prospect 49, St Petersburg 197101, Russia