Spin-Coated CdS Thin Films for n-Channel Thin Film Transistors

被引:96
作者
Seon, Jong-Baek [1 ]
Lee, Sangyoon [1 ]
Kim, Jong Min [1 ]
Jeong, Hyun-Dam [2 ]
机构
[1] Samsung Adv Inst Technol, Display Device & Proc Lab, Yongin 449712, Gyeongggi Do, South Korea
[2] Chonnam Natl Univ, Dept Chem, Gwangju Si 500575, South Korea
关键词
HIGH-PERFORMANCE; REACTIVITY;
D O I
10.1021/cm801557q
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Low-cost and high-performance materials fabricated at low temperatures via solution processes are of great interest in the field of printable and flexible electronics. We have investigated a new solution-based approach to the synthesis of semiconducting chalcogenide films for use in thin-film transistor (TFT) devices in an attempt to develop a simple and robust solution process for the synthesis of inorganic semiconductors. Our material design strategy is to use a sol-gel reaction for the deposition of a spincoated US film that can then be converted to a xerogel material. By carrying out the spin-coating of a L2Cd(S(CO)CH3)(2) (L = 3,5-lutidine) precursor, which condenses at low temperatures to form a CdS network, and then hard-baking at 300 degrees C under atmospheric pressure, microscopically flat films were successfully obtained. To determine the field effect mobilities of the spin-coated US films, we constructed TFTs with an inverted structure consisting of Mo gate electrodes and ZrO2 gate dielectrics. These devices exhibited n-channel TFT characteristics with an excellent field-effect mobility (a saturation mobility of similar to 48 cm(2)V(-1) s(-1)) and a low voltage operation (< 5 V), indicating that these semiconducting thin film materials can be used in low-cost and high-performance printable electronics.
引用
收藏
页码:604 / 611
页数:8
相关论文
共 23 条
[1]   High-performance, solution-processed organic thin film transistors from a novel pentacene precursor [J].
Afzali, A ;
Dimitrakopoulos, CD ;
Breen, TL .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 2002, 124 (30) :8812-8813
[3]   Cadmium sulfide/indium phosphide as a model system for understanding indium related chemical reactivity at CIGS/CdS interface: XPS and ex situ luminescence investigations [J].
Canava, B ;
Gerard, I ;
Guillemoles, JF ;
Lincot, D ;
Etcheberry, A .
THIN SOLID FILMS, 2005, 480 :230-235
[4]   Growth, characterization and application of US thin films deposited by chemical bath deposition [J].
Chang, YJ ;
Munsee, CL ;
Herman, GS ;
Wager, JF ;
Mugdur, P ;
Lee, DH ;
Chang, CH .
SURFACE AND INTERFACE ANALYSIS, 2005, 37 (04) :398-405
[5]  
DUAN X, 2005, NATURE, V425, P274
[6]   Study of the influence of annealing on the properties of CBD-CdS thin films [J].
El Maliki, H ;
Bernède, JC ;
Marsillac, S ;
Pinel, J ;
Castel, X ;
Pouzet, J .
APPLIED SURFACE SCIENCE, 2003, 205 (1-4) :65-79
[7]   Directed assembly of one-dimensional nanostructures into functional networks [J].
Huang, Y ;
Duan, XF ;
Wei, QQ ;
Lieber, CM .
SCIENCE, 2001, 291 (5504) :630-633
[8]  
Hüsing N, 1998, ANGEW CHEM INT EDIT, V37, P23, DOI 10.1002/(SICI)1521-3773(19980202)37:1/2<22::AID-ANIE22>3.0.CO
[9]  
2-I
[10]  
KIM DY, 2005, P 12 INT WORKSH ACT, P299