Modeling and Design of Magnetoelastic Micro-Resonator System for Ultrasensitive Mass Sensing Applications

被引:8
作者
Xue, Cong [1 ]
Li, Xinxin [1 ]
Yang, Chen [1 ]
机构
[1] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China
基金
中国国家自然科学基金;
关键词
Equivalent circuit; magnetoelastic; mass sensing; micro-resonator;
D O I
10.1109/TMAG.2012.2199479
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We report a systematic theoretical investigation on magnetoelastic (ME) micro-resonator sensing system. The system, composed of ME micro-resonator immersed in target liquid and excitation/test coil with network analyzer, features as a wireless sensing mode, which enables the real-time high-sensitivity pathogen detection. A detailed four-step modeling methodology and a new equivalent circuit model for the sensing system are developed, with the system design, simulation, optimization, and experimental validation. Influences of various magnetostrictive materials, resonating structures, and excitation/test coils design on system sensing performance are discussed, revealing systematic design guidelines on real ME micro-resonator system for ultrasensitive mass-sensing applications.
引用
收藏
页码:4092 / 4095
页数:4
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