MEMS Deformable Mirror Actuators with Enhanced Reliability

被引：6

作者：

Cornelissen, S. A. ^{[1
]}

Bifano, T. G. ^{[1
]}

Bierden, P. A. ^{[1
]}

机构：

[1] Boston Micromachines Corp, Cambridge, MA 02138 USA

来源：

MEMS ADAPTIVE OPTICS VI | 2012年 / 8253卷

关键词：

Deformable mirror; spatial light modulators; adaptive optics; MEMS; high contrast imaging;

D O I：

10.1117/12.910742

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

MEMS deformable mirrors with thousands of actuators are under development for space-based operation, which require fault tolerant actuators that will not fail due to electrical overstress. We report on advances made in the development of MEMS deformable mirror actuators with enhanced reliability for space-based, high-contrast imaging instrumentation that eliminate irreversible actuator damage resulting from snap-through.

引用

页数：7

共 4 条

[1] MEMS Deformable Mirrors for Astronomical Adaptive Optics
Cornelissen, S. A.
Hartzell, A. L.
Stewart, J. B.
Bifano, T. G.
Bierden, P. A.
[J]. ADAPTIVE OPTICS SYSTEMS II, 2010, 7736
[2] 4096-element continuous face-sheet MEMS deformable mirror for high-contrast imaging
Cornelissen, Steven A.
Bierden, Paul A.
Bifano, Thomas G.
Lam, Charlie V.
[J]. JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2009, 8 (03):
[3] Reliability of MEMS deformable mirror technology used in adaptive optics imaging systems
Hartzell, Allyson L.
Cornelissen, Steven A.
Bierden, Paul A.
Lam, Charlie V.
Davis, Daniel F.
[J]. MEMS ADAPTIVE OPTICS IV, 2010, 7595
[4] Single Event Effects in MEMS accelerometers
Oudea, Coumar
Poirot, Patrick
Gaillard, Remi
Poivey, Christian
Marchand, Laurent
[J]. 2009 IEEE RADIATION EFFECTS DATA WORKSHOP, WORKSHOP RECORD, 2009, : 94 - +

← 1 →