Design and simulation of High Q MEMS LC-tank for oscillators

被引：2

作者：

Rahimi, Maryam ^{[1
]}

Jamuar, Sudhanshu Shekhar ^{[1
]}

Hamidon, Mohd Nizar ^{[1
]}

Ahmad, Mohd Rais ^{[2
]}

机构：

[1] Univ Putra Malaysia, Fac Engn, Dept Elect & Elect Engn, Serdang 43400, Selangor De, Malaysia

[2] MIMOS Berhad, Kuala Lumpur 57000, Malaysia

来源：

INTERNATIONAL JOURNAL OF ELECTRONICS | 2009年 / 96卷 / 04期

关键词：

LC-tank; MEMS; quality factor; inductor and varactor; SPIRAL INDUCTORS; SILICON; MICROWAVE;

D O I：

10.1080/00207210802641221

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This research focuses on the design of a high-performance MEMS LC-tank using a high Q MEMS inductor and capacitor. A two different gap varactor has been used to avoid pull-in voltage at 2.4GHz. The layout has been done by CoventorWare software. The DC voltage is 2.5v, which is applied to the plates and results of 2.04pF could be gained. The Q factor of the varactor is computed at about 557.27, which is good enough to make a low-phase noise VCO. A hollow spiral inductor with a silicon base substrate for compatibility with CMOS technology has been designed. The Greenhouse equation has been used to obtain the dimensions of the inductor. A suspended inductor has been implemented to avoid substrate coupling. The simulation has been done by CoventorWare. The Q factor of the inductor has been calculated using Yue's model. The resultant values of inductance and the Q factor at 2.4GHz, are 2.89nH and 27, respectively, which are in good agreement with the results of theoretical computation. The results were verified with the well-documented literature.

引用

页码：419 / 436

页数：18

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