RF-MEMS switch design optimization for long-term reliability

被引：0
|
作者：
Mulloni, Viviana [1 ]
Solazzi, Francesco [1 ]
Resta, Giuseppe [1 ]
Giacomozzi, Flavio [1 ]
Margesin, Benno [1 ]
机构：
[1] Fdn B Kessler FBK CMM, I-38123 Trento, Italy
来源：
2013 SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS (DTIP) | 2013年
关键词：
RF-switch; long-term measurements; reliability;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This contribution presents an optimization strategy for the mechanical and geometrical characteristics of clamped-clamped RF-MEMS switches in order to enhance their reliability performances both in terms of switch properties control and long-term stress actuation tests. Experimental measurements demonstrated that the optimized version of the capacitive switch investigated shows an improved resistance to high bias voltage, while the optimized ohmic switch shows a lower and more reproducible contact resistance.
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页数：6
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