A Frequency Agile Switched Delay Line Slow-wave BiCMOS Filter

A mm-wave BiCMOS back-end metallization switched delay line frequency agile filter is presented. Miniaturization of the delay lines is achieved by using slow-wave propagation modes on shielded CPWs, with a standard BiCMOS process transistors used as on-chip switching elements. A first-order filter is presented, with simulation results indicating one transmission band at 40.4 GHz of 22.8% relative bandwidth and insertion loss of -12.25 dB, with the other transmission band at 47.55 GHz with a 23.79% relative bandwidth and insertion loss of -13.66 dB. Both bands feature below -15 dB input reflection loss. The paper further establishes the potential for shielded CPW transmission lines for the design of complex passive devices on the back-end metallization of various semiconductor technologies.