Spin coating fabrication of thin film transistors using enriched semiconducting SWNT solution

被引:0
作者
Huang, Jun [1 ]
Somu, Sivasubramanian [1 ]
Busnaina, Ahmed [1 ]
机构
[1] Northeastern Univ, NSF Nanoscale Sci & Engn Ctr High Rate Nanomfg, Boston, MA 02115 USA
基金
美国国家科学基金会;
关键词
carbon nanotubes; spin coating; transistor; semiconductors; WALL CARBON NANOTUBES; NANOELECTRONICS; TRANSPARENT; CIRCUITS;
D O I
10.1007/s13391-013-0031-3
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Semiconducting single wall carbon nanotubes (SWNT) are excellent candidates for thin film transistor (TFT) applications. Major obstacles in developing low cost separation techniques for high purity semiconducting SWNTs have hindered their incorporation into many low-end functional devices. For low-end transistor devices a moderate ON/OFF ratio and performance is sufficient. A mix of single wall nanotubes with enriched semiconducting tubes can meet these needs. Using such 90% semiconducting enriched SWNTs, we have fabricated thin film transistors with a maximum 10(4) ON/OFF ratio. The device-manufacturing yield was low due to inconsistencies in the distribution of the SWNTs across the wafer. Increasing the density of the SWNTs in the channel using the drop casting method increased the device-manufacturing yield but decreased the performance. Conducting multiple spin coating processes is expected to increase the device-manufacturing yield without sacrificing device performance.
引用
收藏
页码:505 / 507
页数:3
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