共 42 条
Vertically Aligned Ge Nanowires on Flexible Plastic Films Synthesized by (111)-Oriented Ge Seeded Vapor-Liquid-Solid Growth
被引:22
作者:

Toko, Kaoru
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Univ Tsukuba, Inst Appl Phys, Tsukuba, Ibaraki 3058573, Japan Univ Tsukuba, Inst Appl Phys, Tsukuba, Ibaraki 3058573, Japan

Nakata, Mitsuki
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h-index: 0
机构:
Univ Tsukuba, Inst Appl Phys, Tsukuba, Ibaraki 3058573, Japan Univ Tsukuba, Inst Appl Phys, Tsukuba, Ibaraki 3058573, Japan

Jevasuwan, Wipakorn
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h-index: 0
机构:
Natl Inst Mat Sci, Int Ctr Mat Nanoarchitecton, Tsukuba, Ibaraki 3050044, Japan Univ Tsukuba, Inst Appl Phys, Tsukuba, Ibaraki 3058573, Japan

Fukata, Naoki
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机构:
Natl Inst Mat Sci, Int Ctr Mat Nanoarchitecton, Tsukuba, Ibaraki 3050044, Japan Univ Tsukuba, Inst Appl Phys, Tsukuba, Ibaraki 3058573, Japan

Suemasu, Takashi
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Univ Tsukuba, Inst Appl Phys, Tsukuba, Ibaraki 3058573, Japan Univ Tsukuba, Inst Appl Phys, Tsukuba, Ibaraki 3058573, Japan
机构:
[1] Univ Tsukuba, Inst Appl Phys, Tsukuba, Ibaraki 3058573, Japan
[2] Natl Inst Mat Sci, Int Ctr Mat Nanoarchitecton, Tsukuba, Ibaraki 3050044, Japan
基金:
日本学术振兴会;
关键词:
germanium nanowires;
flexible substrates;
crystal orientation control;
chemical vapor deposition;
metal-induced crystallization;
GERMANIUM NANOWIRES;
CORE-SHELL;
NANOPARTICLE CATALYSTS;
EUTECTIC TEMPERATURE;
SILICON;
ARRAYS;
HETEROSTRUCTURES;
ELECTRONICS;
TRANSISTORS;
NANOSCALE;
D O I:
10.1021/acsami.5b05394
中图分类号:
TB3 [工程材料学];
学科分类号:
0805 ;
080502 ;
摘要:
Transfer-free fabrication of vertical Ge nanowires (NW's) on a plastic substrate is demonstrated using a vapor liquid-solid (VLS) method. The crystal quality of Ge seed layers (50 nm thickness) prepared on plastic substrates strongly influenced the VLS growth morphology, i.e., the density, uniformity, and crystal quality of Ge NWs. The metal-induced layer exchange yielded a (111)-oriented Ge seed layer at 325 degrees C, which allowed for the VLS growth of vertically aligned Ge NWs. The Ge NW array had almost the same quality as that formed on a bulk Ge(111) substrate. Transmission electron microscopy demonstrated that the Ge NWs were defect-free single crystals. The present investigation paves the way for advanced electronic optical devices integrated on a low-cost flexible substrate.
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页码:18120 / 18124
页数:5
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