NANOPARTICLE LOCALIZATION ON SOLID-STATE NANOPORES VIA ELECTROPHORETIC FORCE

被引：0
|
作者：
Li, Shiyu [1 ]
Zeng, Shuangshuang [1 ]
Zhang, Zhen [1 ]
Hjort, Klas [1 ]
Zhang, Shi-Li [1 ]
机构：
[1] Uppsala Univ, Dept Engn Sci, Uppsala, Sweden
来源：
2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) | 2019年
基金：
瑞典研究理事会;
关键词：
Solid-state nanopore; electron beam induced deposition (EBID); electrophoresis; nanoparticle localization; carbon nanoarrays;
D O I：
10.1109/transducers.2019.8808305
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This work presents a versatile and facile method for precise localization of nanoparticles on solid-state nanopores surface-functionalized with carbon via electron beam induced deposition (EBID). For the first time, EBID of carbon is demonstrated to enable nanoparticle localization on solid-state nanopores. To avoid non-specific adsorption of nanoparticles on the surface, an atomic layer deposited Al2O3 layer in combination with phosphonate passivation is used. By tuning the electron dose in the EBID process, the loading fraction of nanoparticles on carbon nanoarrays can be varied on similarly sized domains. Nanoparticle loading driven by electrophoresis can achieve an efficiency that is orders of magnitude higher than that driven by diffusion.
引用
收藏
页码：2372 / 2375
页数：4
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