Simulation and fabrication of carbon nanotubes field emission pressure sensors

被引：9

作者：

Qian, Kaiyou ^{[1
]}

Chen, Ting

Yan, Bingyong

Lin, Yangkui

Xu, Dong

Sun, Zhuo

Cai, Bingchu

机构：

[1] Shanghai Jiao Tong Univ, Res Inst Micronanometer Sci & Technol, Minist Educ, Key Lab Thin Film & Microfabricat Technol, Shanghai 200030, Peoples R China

[2] E China Normal Univ, Nanotech Ctr, Shanghai 200062, Peoples R China

来源：

APPLIED SURFACE SCIENCE | 2006年 / 252卷 / 12期

关键词：

carbon nanotubes; field emission; pressure sensors;

D O I：

10.1016/j.apsusc.2005.06.029

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

A novel field emission pressure sensor has been achieved utilizing carbon nanotubes (CNTs) as the electron source. The sensor consists of the anode sensing film fabricated by wet etching process and multi-wall carbon nanotubes (MWNTs) cathode in the micro-vacuum chamber. MWNTs on the silicon substrate were grown by thermal CVD. The prototype pressure sensor has a measured sensitivity of about 0.17-0.77 nA/Pa (101-550 KPa). The work shows the potential use of CNTs-based field-emitter in microsensors, such as accelerometers and tactile sensors. (c) 2005 Elsevier B.V. All rights reserved.

引用

页码：4198 / 4201

页数：4

共 6 条

[1] HELICAL MICROTUBULES OF GRAPHITIC CARBON [J].

IIJIMA, S .

NATURE, 1991, 354 (6348) :56-58

[2]

JIANG JC, 1991, 6 INT C SOL STAT SEN, P238

[3] Field emission from carbon nanotubes for displays [J].

Kim, JM ;

Choi, WB ;

Lee, NS ;

Jung, JE .

[4] Development of an integrated vacuum microelectronic tactile sensor array [J].

Wen, ZY ;

Wu, Y ;

Zhang, ZY ;

Xu, SL ;

Huang, SL ;

Li, YL .

SENSORS AND ACTUATORS A-PHYSICAL, 2003, 103 (03) :301-306

[5] Novel cold cathode materials and applications [J].

Xu, NS ;

Huq, SE .

MATERIALS SCIENCE & ENGINEERING R-REPORTS, 2005, 48 (2-5) :47-189

[6]

Zhu W., 2001, Vacuum Microelectronics

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